Open Questions: Microelectromechanical Systems
Micro Systems Laboratories
- At the University of California, Los Angeles. Does work on
MEMS (Micro-electro-mechanical Systems) and micro-fluidics.
- Article from
- The Little Machines That Are Making It Big
David Bishop; Peter Gammel; C. Randy Giles
Physics Today, October 2001, pp. 38-44
- Microelectromechanical systems are silicon-based machines from
.1 to 100 microns in size. They are already being used in such
applications as automotive airbags, fiber optic switches, digital
projection systems, and scientific measuring devices. They could
drive a new industrial revolution based on a new and wholly
different class of machines.
- The Little Engines That Couldn't
Science News, July 22, 2000, pp. 56-58
- Moving parts of micromachines that are smaller than 100
microns in size encounter difficulties due to physical effects
between surfaces in contact.
- May the Micro Force Be With You
Technology Review, September/October, 1999, pp. 74-82
- MEMS - microelectromechanical systems - are far along in
the R&D cycle. They are already used in digital projection systems,
and may soon be used in a variety of other communication and
- Silicon Micromechanical Devices
James B. Angell; Stephen C. Terry; Phillip W. Barth
Scientific American, April 1983, pp. 44-55
- Very small mechanical devices can be etched in silicon in the
same was as electronic circuits. Mechanical systems which have
already been fabricated include valves, nozzles, and pressure sensors.
Copyright © 2002 by Charles Daney, All Rights Reserved